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electrothermal actuator

1MEMS 1bidirectional motion 1electrothermal sensor 1feedback 1feedforward 1microsystem design 1nanopositioning

1Fowler, Anthony G. 1Rakotondrabe, Micky 1Yuce, Mehmet Rasit 1Zhu, Yong

1conference paper 1journal article

Date

12012 12013

Facets

1MEMS 1bidirectional motion 1electrothermal sensor 1feedback 1feedforward 1microsystem design 1nanopositioning

1Fowler, Anthony G. 1Rakotondrabe, Micky 1Yuce, Mehmet Rasit 1Zhu, Yong

1conference paper 1journal article

Date

12012 12013

Title
Creator
Date

Closed-loop control of a novel 2-DOF MEMS nanopositioner with electrothermal actuation

- Fowler, Anthony G., Rakotondrabe, Micky, Moheimani, S. O. Reza

Creator: Fowler, Anthony G. , Rakotondrabe, Micky , Moheimani, S. O. Reza
Resource Type: conference paper
Date: 2013

Bidirectional electrothermal actuator with Z-shaped beams

- Zhu, Yong, Moheimani, S. O. Reza, Yuce, Mehmet Rasit

Creator: Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
Resource Type: journal article
Date: 2012

1

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